Improved Low Voltage SEM Image Resolution Through the Use of Image Restoration Techniques
نویسندگان
چکیده
منابع مشابه
A New Image Restoration Technique for SEM
This paper proposes a new fast and effective method of image restoration to improve the resolution of SEM images. In our approach, image resolution is improved by deconvolution with the point spread function modeled as the intensity distribution of the electron beam at the specimen's surface. The beam intensity distribution under each imaging condition is estimated by electro-optical simulation...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2015
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927615000963